AMHS OVERVIEW

  • AMHS (Automated Material Handling System) comprises a set of components utilized to move and store WIP material within a factory without the need for human intervention.
  • Material Stockers are placed in each bay of the factory and are utilized to store carriers of WIP as well as to act as a connection point between distinct transport systems.
  • The material movement is accomplished by transport systems that usually take the form of an Overhead Hoist Transport (OHT), OverHead Shuttle (OHS), Automated Guided Vehicle (AGV), Rail Guided Vehicle (RGV), and associated control and routing software.

Diagram of the Automatic Material Handling process

AMHS STORAGE PRODUCTS

7000 Series

7000 Series

  • 200mm and 300mm wafers
  • Storage System

Turbo Stocker

Turbo Stocker

  • 200mm and 300mm wafers
  • Storage System

AMHS TRANSPORT PRODUCTS

AeroTrak

AeroTrak

  • AeroTrak: AT1, AT2, AT3
  • 200mm and 300mm wafers
  • Storage System to Storage System / Process Tool
  • Turntable, Horizontal Table, AT Controller

AeroLoader

AeroLoader

  • AeroLoader: AL IV
  • 200mm and 300mm wafers
  • Storage System to Storage System / Process Tool
  • Turntable, Horizontal Table, AT Controller